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SEMI International Standards
SEMI New Activity Report Forms (SNARFs)
& SEMI Task Force Organization Forms (TFOFs)
Below you will find the TFOFs of all the task forces actively working in each region. The TFOF contains the charter and purpose of each task force.
The SNARFs that are listed under each task force are the individual activities of the task force. While the majority of these activities lead to the creation or revision of a standard, there are some activities which are focused on exploring and expanding the program.
If you have any further questions on a specific activity, contact your local Standards staff. A listing of global SEMI Standards staff can be found on the
contact information page
.
Blank forms
:
TFOF
(DOC 115K) (Feb 2024)
SNARF
(DOC 133K) (Apr 2024)
The listing of SNARFs and TFOFs below are sorted by Global Technical Committee, and then by the region that approved the TFOF.
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3D Packaging and Integration
Automated Test Equipment
Automation Technology
Compound Semiconductor Materials
EH&S
Facilities
Flat Panel Display (FPD) - Materials & Components
Flat Panel Display (FPD) - Metrology
Flexible Hybrid Electronics (FHE)
FPD - Metrology
Gases
HB-LED
Information & Control
Liquid Chemicals
MEMS / NEMS
Metrics
Japan
North America
Critical Chamber Components (CCC) Test Methods Task Force
6931
New Standard: Test Method for Measuring Organics Contamination Through Thermal Desorption or Solvent Extraction Gas Chromatography Mass Spectrometry of Critical Chamber Components Used in Semiconductor Wafer Processing and Inspection
7129
New Standard: Test Method for Liquid Particle Counter Measuring Particles Contamination of Critical Chamber Components and Coupons
7130
New Standard: Test Method for Measuring Surface Contamination by Particle Concentration Through Replacement Substrate and Optical Metrology of Critical Chamber Components Used in Semiconductor Wafer Processing and Inspection
7167
New Standard: Test Method for Measuring and Characterizing Surface Particle Contamination on Critical Chamber Components with Airborne Particle Counter and Dry Aerosolizing Chamber
TFOF
Critical Chamber Components (CCC) Test Methods Task Force
EMC Task Force
Equipment Cost of Ownership Task Force
Equipment RAMP (Reliability, Availability, Maintainability, and Productivity) Metrics Task Force
Equipment Training and Documentation Task Force
ESD/ESC Task Force- N.A
North America Metrics Technical Committee
RF Measurements Task Force
Micropatterning
Photovoltaic
Photovoltaic (PV) - Materials
Physical Interfaces & Carriers
Silicon Wafer
Traceability
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