SEMI International Standards
Standards Locale: North America
Committee: Facilities & Gases
Place of Meeting: SEMI Headquarters, Milpitas, California/USA
Date of Meeting: 02/25/2025
Meeting End Date: 02/25/2025
Recording SEMI Standards Staff: Laura Nguyen
CER Posted to Web: 03/12/2025
Leadership Changes
None.
TC Chapter Structure Changes
Previous WG/TF/SC Name | New WG/TF/SC Name or Status Change |
| Facilities |
| Building Information Modeling (BIM) for Semiconductor Capital Equipment Task Force | Manufacturing Equipment Installation Task Force |
| Gases |
| None |  |
Ballot Results
NOTE 1: Passed ballots and line items will be submitted to the ISC Audit & Review Subcommittee for procedural review.
NOTE 2: Failed ballots and line items were returned to the originating task forces for re-work and re-balloting or abandoning.
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
# | Type | SC/TF/WG | Details |
| Facilities |
| None | | | |
| Gases |
| 7325 | Gases SNARF & Ballot Authorization | Filters & Purifiers TF | Revision to SEMI F28-1103 (Reapproved 0815), Test Method for Measuring Particle Generation from Process Panels
– Approved by GCS on 01/06/2025 |
| 7326 | Gases SNARF & Ballot Authorization | Filters & Purifiers TF | Revision to SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters
– Approved by GCS on 01/06/2025 |
| 7327 | Gases SNARF & Ballot Authorization | Mass Flow Controllers TF | Line-Item Revision to SEMI E56-0317, Test Method for Determining Accuracy, Linearity, Repeatability, Short-Term Reproducibility, Hysteresis, and Deadband of Thermal Mass Flow Controllers
– Approved by GCS on 01/06/2025 |
| 7328 | Gases SNARF & Ballot Authorization | Materials of Construction of Gas Delivery Systems TF | Revision to SEMI F69-1213E, Test Method for Transport and Shock Testing of Gas Delivery Systems
– Approved by GCS on 01/06/2025 |
Authorized Activities
Listing of all revised or new SNARF(s) and TFOF(s) approved by the Originating TC Chapter.
# | Type | SC/TF/WG | Details |
| Facilities |
- | TFOF | Revise TF name | Approved the revised TFOF for Building Information Modeling (BIM) for Semiconductor Capital Equipment TF to Manufacturing Equipment Installation TF and updates to the charter and scope. |
| Gases |
| None | | | |
NOTE 1: SNARFs and TFOFs are available for review on the SEMI Web site at: http://downloads.semi.org/web/wstdsbal.nsf/TFOFSNARF
Authorized Ballots
Listing of documents authorized by the Originating TC Chapter for Letter Ballot.
# | When | TF | Details |
| Facilities |
| None | | | |
| Gases |
| 7153 | Cycle 4, or 5-2025 | Mass Flow Controllers TF | Line-Item Revision to SEMI E66-0611 (Reapproved 0517), Test Method for Determining Particle Contribution by Mass Flow Controllers |
| 7326A | Cycle 4, 2025 | Filters & Purifiers TF | Revision to SEMI F43-0308 (Reapproved 0613), Test Method for Determination of Particle Contribution by Point-of-Use Gas Purifiers and Gas Filters |
SNARF(s) Granted a One-Year Extension
# | TF | Title | Expiration Date |
| Facilities |
| None | | | |
| Gases |
| 6612 | Materials of Construction of Gas Delivery Systems TF | New Subordinate Standard: Test Method for the Determination of Conductance of Fluid Handling Components at Sub-atmospheric and Vacuum Pressure, to SEMI F32-0211, Test Method for Determination of Flow Coefficient for High Purity Shutoff Valves | Winter 2026 |
NOTE 1: If the Standards Document Development Project is found to be continuing, but cannot be completed within the current project
period, the TC Chapter may grant a one-year extension at a time, as many times as necessary. [Regulations § 8.3]
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
The next meeting is tentatively scheduled for the week of June 2-5, in conjunction with SEMI Standards NA Summer Meetings 2025. Schedule details TBD. Please check www.semi.org/standards for updates.
Facilities and Gases Task Forces meet Monday, and the TC Chapter will meet on Tuesday
Tentative Schedule
· Monday, June 2
o 9:00, Materials of Construction of Gas Delivery Systems
o 10:00, Filters & Purifiers
o 11:00, Mass Flow Controller
o 13:00, Gases Specification
o 13:00, Voltage Sag Immunity TF
o 14:00, Heater Jacket
o 15:00, BIM TF
· Tuesday, June 3
o 9:00-12:00 Noon, Facilities & Gases NA TC Chapter
|