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 | 3D Packaging and Integration Committee |
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| SNARF | | | | | Doc 7501 - Revision to SEMI 3D23-0721: Specification for Glass Carrier Characteristics for Panel Level Packaging (PLP) Applications | |
| EH&S Committee |
| |
| SNARF | | | | | Doc 7485 - Revision to SEMI S14-0521 - Safety Guideline for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (Fire Protection) | |
| SNARF | | | | | Doc 7490 -
New Standard: Safety Guideline for Autonomous Mobile Robots (AMR) in Semiconductor Manufacturing | |
| SNARF | | | | | Doc 7499 - New Safety Guideline for Pedestrian-Propelled Transport Units of Mobile Maintenance Robots | |
| Facilities Committee |
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| SNARF | | | | | Doc 7507 - Reapproval of SEMI E70-1213 (Reapproved 1021), Guide for Tool Accommodation Process | |
| Flat Panel Display (FPD) - Materials & Components Committee |
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| SNARF | | | | | Doc 7504 - Reapproval of SEMI D50-0822, Test Method for Surface Hardness of Flat Panel Display (FPD) Components | |
| SNARF | | | | | Doc 7505 - Reapproval of SEMI D74-1121, Guide for Measuring Dimensions of Plastic Films/Substrates | |
| Flat Panel Display (FPD) - Metrology Committee |
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| SNARF | | | | | Doc 7486 - Reapproval of SEMI D79-0421, TEST METHOD FOR LOCAL AND OVERALL FLICKER OF FLEXIBLE DISPLAYS | |
| Gases Committee |
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| SNARF | | | | | Doc 7506 - Reapproval of SEMI E49.6-1103 (Reapproved 1211), Guide for Subsystem Assembly and Testing Procedures – Stainless Steel Systems | |
| SNARF | | | | | Doc 7508 - Reapproval of SEMI F019-0815, Specification for the Surface Condition of the Wetted Surfaces of Stainless Steel Components | |
| SNARF | | | | | Doc 7509 - Reapproval of SEMI F022-0812 (Reapproved 0518), Guide for Bulk and Specialty Gas Distribution Systems | |
| SNARF | | | | | Doc 7510 - Reapproval of SEMI F037-0318, Test Method for Determination of Surface Roughness Parameters for Gas Distribution System Components | |
| SNARF | | | | | Doc 7511 - Reapproval of SEMI F072-0214 (Reapproved 0221), Test Method for Auger Electron Spectroscopy (AES) Evaluation of Oxide Layer of Wetted Surfaces of Passivated 316L Stainless Steel Components | |
| SNARF | | | | | Doc 7512 - Reapproval of SEMI F101-1105 (Reapproved 1018), Test Method for Determining Pressure Regulator Performance in Gas Distribution Systems | |
| SNARF | | | | | Doc 7513 - Reapproval of SEMI F117-1121, Specification for Dimensions of Sandwich Components for 1.125 Inch Type Surface Mount Gas Distribution Systems | |
| SNARF | | | | | Doc 7514 - Reapproval of SEMI F119-1121, Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used in Corrosive Gas Systems by Use of a Ferric Chloride Solution | |
| Information & Control Committee |
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| SNARF | | | | | Doc 7478 - Revision to SEMI E95-1101: Specification for Human Interface for Semiconductor Manufacturing Equipment and Revision to Add a New Subordinate Standard: Specification on Communicating Safety Information in Human Interfaces to SEMI E095-1011: Specification for Human Interface for Semiconductor Manufacturing Equipment | |
| SNARF | | | | | Doc 7480 - New Standard: Specification for Equipment Edge Data Integration | |
| SNARF | | | | | Doc 7487 - Line Item Revision to SEMI E190-1124 – Specification for Equipment Data Publication (EDP) | |
| SNARF | | | | | Doc 7488 - Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-1225 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and
SEMI E179-1225 Specification for Protocol Buffers Common Components | |
| SNARF | | | | | Doc 7489 - Line Item Revision to E5-0725, Specification for SEMI Equipment Communications Standard 2 Message Content (SECS-II), E30-0725, Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM) | |
| SNARF | | | | | Doc 7491 - Line Item Revision to SEMI E40-0226: Specification for Processing Management and SEMI E40.1-0226: Specification for SECS-II Protocol for Processing Management | |
| SNARF | | | | | Doc 7492 - Line Item Revision to SEMI E94-0226 - Specification for Control Job Management and SEMI E94.1-0226 — Specification for SECS-II Protocol for Control Job Management (CJM) | |
| SNARF | | | | | Doc 7493 - Line Item Revision to SEMI E87-0225: Specification for Carrier Management (CMS), SEMI E87.1-0225: Specification for SECS-II Protocol for Carrier Management (CMS), SEMI E172-0725: SEMI E172 - Specification for SECS Equipment Data Dictionary (SEDD) | |
| SNARF | | | | | Doc 7494 - Withdrawal of SEMI E188-0222 - Specification for Malware Free Equipment Integration | |
| Liquid Chemicals Committee |
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| SNARF | | | | | Doc 7482 - New Auxiliary Information: Report on Closing Metrologies Gaps for post-CMP Brushes | |
| SNARF | | | | | Doc 7500 - Revision to SEMI C96-1121, Test Method for Determining Density of Chemical Mechanical Planarization (CMP) Slurries | |
| MEMS / NEMS Committee |
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| SNARF | | | | | Doc 7516 - Reapproval of SEMI MS04-0416 (Reapproved 0522), Test Method for Young's Modulus Measurements of Thin, Reflecting Films Based on the Frequency of Beams in Resonance | |
| SNARF | | | | | Doc 7517 - Reapproval of SEMI MS08-0309 (Reapproved 0622), Guide to Evaluating Hermeticity of Microelectromechanical Systems (MEMS) Packages | |
| SNARF | | | | | Doc 7518 - Reapproval of SEMI MS14-0422, Guide for Critical Parameters of Gas Sensors | |
| Physical Interfaces & Carriers Committee |
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| SNARF | | | | | Doc 7483 - New Standard: Specification for Process Cell Anchoring | |
| SNARF | | | | | Doc 7484 - New Standard: Specification for Mainframe Garage and Process Cell Envelope Dimensions | |
| SNARF | | | | | Doc 7497 - New Standard: Specification for Utility Connection between Process Cell and Garage in Mainframe System | |
| SNARF | | | | | Doc 7498 - New Standard: Specification for 310mm Square Panel Loadport | |
| SNARF | | | | | Doc 7515 - Line-Item Revision to SEMI Exxx: Specification for Container for Transport and Storage of Transmission Electron Microscope (TEM) Lamella Carriers within Electron Microscopy Workflows | |
| Silicon Wafer Committee |
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| SNARF | | | | | Doc 7496 - Line-item revision to SEMI M90-0821: Test Method for Bulk Micro Defect Density and Denuded Zone Width in Annealed Silicon Wafers by Optical Microscopy After Preferential Etching | |
| SNARF | | | | | Doc 7502 - Line Item Revision of SEMI M67-0720 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Thickness Data Array Using the ESFQR, ESFQD, and ESBIR Metrics | |
| SNARF | | | | | Doc 7503 - Line Item Revision of SEMI M68-0720 - Test Method for Determining Wafer Near-Edge Geometry from a Measured Height Data Array Using a Curvature Metric, ZDD | |
| Traceability Committee |
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| SNARF | | | | | Doc 7495 - Line-Item Revision to SEMI T27-1125E, Specification for Traceability Identification Label of Component Parts | |
| TFOF | | | | | 310mm Square Glass Carrier ID Marking Task Force | |