SEMI International Standards
SEMI New Activity Report Forms (SNARFs)
& SEMI Task Force Organization Forms (TFOFs)

Below you will find the TFOFs of all the task forces actively working in each region. The TFOF contains the charter and purpose of each task force.

The SNARFs that are listed under each task force are the individual activities of the task force. While the majority of these activities lead to the creation or revision of a standard, there are some activities which are focused on exploring and expanding the program.

If you have any further questions on a specific activity, contact your local Standards staff. A listing of global SEMI Standards staff can be found on the contact information page.

Blank forms：
TFOF (DOC 115K) (Sept 2024)
SNARF (DOC 133K) (April 2026)

The listing of SNARFs and TFOFs below are sorted by Global Technical Committee, and then by the region that approved the TFOF.

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Show details for 3D Packaging and Integration3D Packaging and Integration
Show details for Automated Test EquipmentAutomated Test Equipment
Show details for Automation TechnologyAutomation Technology
Show details for Compound Semiconductor MaterialsCompound Semiconductor Materials
Show details for EH&SEH&S
Show details for FacilitiesFacilities
Show details for Flat Panel Display (FPD) - Materials & ComponentsFlat Panel Display (FPD) - Materials & Components
Show details for Flat Panel Display (FPD) - MetrologyFlat Panel Display (FPD) - Metrology
Show details for Flexible Hybrid Electronics (FHE)Flexible Hybrid Electronics (FHE)
Show details for GasesGases
Show details for HB-LEDHB-LED
Hide details for Information & ControlInformation & Control
Show details for ChinaChina
Show details for JapanJapan
Show details for KoreaKorea
Hide details for North AmericaNorth America
Show details for Advanced Backend Factory IntegrationAdvanced Backend Factory Integration
Hide details for Diagnostic Data Acquisition Task Force NADiagnostic Data Acquisition Task Force NA
7174Line Item Revision to SEMI E128-0414 (Reapproved 0519), Specification for XML Message Structures
7175Line Item Revision to SEMI E132-0923 Specification for Equipment Client Authentication and Authorization and SEMI E132.2-0923 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)
7176Line Item Revision to SEMI E134-0923 Specification for Data Collection Management and SEMI E134.2-0923 Specification for Protocol Buffers of Data Collection Management
7179Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Generic Model for Communication and Control of Manufacturing Equipment (GEM) to
SEMI E164-0414 (Reapproved 0721), Specification for EDA Common Metadata
7180Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Processing Management to SEMI E164-0414 (Reapproved 0721), Specification for EDA Common Metadata
7181Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Carrier Management (CMS) to SEMI E164-0414 (0721), Specification for EDA Common Metadata
7182Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Substrate Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata
7183Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Control Job Management to SEMI E164-0414 (0721), Specification for EDA Common Metadata
7184Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Equipment Performance Tracker to SEMI E164-0414 (0721), Specification for EDA Common Metadata
7185Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Time Synchronization and Definition of the TS-Clock Object to SEMI E164-0414 (0721), Specification for EDA Common Metadata
7186Revision to Add a New Subordinate Standard: Specification for EDA Common Metadata for Module Process Tracking to SEMI E164-0414 (0721), Specification for EDA Common Metadata
7191Line Item Revision to SEMI E179-0623 Specification for Protocol Buffers Common Components
7228Line Item Revision to SEMI E134-0923 Specification for Data Collection Management and SEMI E134.2-0923 Specification for Protocol Buffers of Data Collection Management
7229Line Item Revision to SEMI 179-0623 Specification for Protocol Buffers Common Components
7271Line Item Revision to SEMI E120-0922 (Reapproved 0823), Specification for the Common Equipment Model (CEM) and SEMI E120.2-0823 Specification for Protocol Buffers for Common Equipment Model (CEM)
7272Line Item Revision to SEMI E132-0923 (Reapproved 0624), Specification for Equipment Client Authentication and Authorization, and E132.2-0923 (Reapproved 0624), Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA)
7273Line Item Revision to SEMI E134-0624, Specification for Data Collection Management, and SEMI E134.2-0624, Specification for Protocol Buffers of Data Collection Management
7274Line Item Revision to SEMI E179-0624, Specification for Protocol Buffers Common Components
7288Line Item Revision to
SEMI E120-0922 (Reapproved 0823) Specification for the Common Equipment Model (CEM),
SEMI E120.2-0823 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-0923, Specification for Equipment Self Description (EqSD) and SEMI E125.2-0923 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-0624 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-0624 SPECIFICATION FOR PROTOCOL BUFFERS FOR EQUIPMENT CLIENT AUTHENTICATION AND AUTHORIZATION (ECA),
SEMI E134-0624 Specification for Data Collection Management,
SEMI E134.2-0624 Specification for Protocol Buffers of Data Collection Management,
SEMI E179-0624 Specification for Protocol Buffers Common Components
7419Line-Item Revision to
SEMI E120-1225 Specification for the Common Equipment Model (CEM),
SEMI E120.2-1225 Specification for Protocol Buffers for Common Equipment Model (CEM),
SEMI E125-1225 Specification for Equipment Self Description (EqSD),
SEMI E125.2-1225 Specification for Protocol Buffers for Equipment Self Description (EqSD),
SEMI E132-1225 Specification for Equipment Client Authentication and Authorization,
SEMI E132.2-1225 Specification for Protocol Buffers for Equipment Client Authentication and Authorization (ECA),
SEMI E134-1225 Specification for Data Collection Management,
SEMI E134.2-1225 Specification for Protocol Buffers of Data Collection Management, and
SEMI E179-1225 Specification for Protocol Buffers Common Components
7421Line-Item Revision to SEMI E178-0120 Guide for EDA Freeze Version
7422Revision to
SEMI E164-1224 Specification for EDA Common Metadata
And To Add New Subordinate Standards
Specification for GEM Common EDA Metadata,
Specification for Process Job Management GEM Common EDA Metadata, and
Specification for Carrier Management Services Common EDA Metadata
to SEMI E164-1224 Specification for EDA Common Metadata
TFOFDiagnostic Data Acquisition Task Force NA
Show details for Digital Twins in Manufacturing Task ForceDigital Twins in Manufacturing Task Force
Show details for Energy Saving Equipment Communication Task ForceEnergy Saving Equipment Communication Task Force
Show details for Equipment Data Publication (EDP) Task ForceEquipment Data Publication (EDP) Task Force
Show details for Fab & Equipment Computer and Device Security (CDS) Task ForceFab & Equipment Computer and Device Security (CDS) Task Force
Show details for GEM 300 Task ForceGEM 300 Task Force
Show details for Graphical User Interfaces (GUI) Task ForceGraphical User Interfaces (GUI) Task Force
Show details for NA Information and Control CommitteeNA Information and Control Committee
Show details for Process Control System NAProcess Control System NA
Show details for Sensor Bus Task ForceSensor Bus Task Force
Show details for TaiwanTaiwan
Show details for Liquid ChemicalsLiquid Chemicals
Show details for MEMS / NEMSMEMS / NEMS
Show details for MetricsMetrics
Show details for MicropatterningMicropatterning
Show details for PhotovoltaicPhotovoltaic
Show details for Photovoltaic (PV) - MaterialsPhotovoltaic (PV) - Materials
Show details for Physical Interfaces & CarriersPhysical Interfaces & Carriers
Show details for Silicon WaferSilicon Wafer
Show details for TraceabilityTraceability

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