SEMI International Standards
SEMI New Activity Report Forms (SNARFs)
& SEMI Task Force Organization Forms (TFOFs)
Below you will find the TFOFs of all the task forces actively working in each region. The TFOF contains the charter and purpose of each task force.
The SNARFs that are listed under each task force are the individual activities of the task force. While the majority of these activities lead to the creation or revision of a standard, there are some activities which are focused on exploring and expanding the program.
If you have any further questions on a specific activity, contact your local Standards staff. A listing of global SEMI Standards staff can be found on the contact information page.
Blank forms:
TFOF (DOC 115K) (Sept 2024)
SNARF (DOC 133K) (April 2026)
The listing of SNARFs and TFOFs below are sorted by Global Technical Committee, and then by the region that approved the TFOF.
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 | 3D Packaging and Integration |
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 | Automated Test Equipment |
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 | Automation Technology |
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 | Compound Semiconductor Materials |
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 | EH&S |
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 | Facilities |
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 | Flat Panel Display (FPD) - Materials & Components |
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 | Flat Panel Display (FPD) - Metrology |
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 | Flexible Hybrid Electronics (FHE) |
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 | Gases |
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 | HB-LED |
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 | Information & Control |
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 | Liquid Chemicals |
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 | Europe |
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 | Japan |
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 | North America |
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 | Chemical Analytical Methods Task Force |
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 | Chemical Mechanical Planarization Consumables (CMP-C) Task Force |
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 | High Purity Liquid Assemblies & Systems Task Force |
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 | High Purity Polymer Materials and Components Task Force |
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 | Liquid Chemicals Committee |
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 | Statistical Methods Task Force |
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 | Ultra Pure Water Task Force |
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| | | 7086 | Revision to SEMI F61–0521, Guide for Design and Operation of a Semiconductor Ultrapure Water System, with title change to: Guide for Design, Construction, Installation, and Operation of a Semiconductor Ultrapure Water System |  |
| | | 7088 | Revision to SEMI F75-0521, Guide for Quality Monitoring of Ultrapure Water Used in Semiconductor Manufacturing |  |
| | | 7284 | New Standard: Guide to Evaluate the Efficacy of Particle Precursor Reduction Devices Used in Ultrapure Water (UPW) Systems |  |
| | | 7467 | New Auxiliary Information Document Comparing and Contrasting SEMI C79, C82 and C89 |  |
| | | TFOF | Ultra Pure Water Task Force |  |
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 | Water Management Task Force |
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 | MEMS / NEMS |
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 | Metrics |
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 | Micropatterning |
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 | Photovoltaic |
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 | Photovoltaic (PV) - Materials |
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 | Physical Interfaces & Carriers |
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 | Silicon Wafer |
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 | Traceability |
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