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SEMI International Standards
Standards Locale:
Japan
Committee:
Silicon Wafer
Place of Meeting:
Tokyo
Date of Meeting:
12/15/2016
Meeting End Date:
12/15/2016
Recording SEMI Standards Staff:
Junko Collins
CER Posted to Web:
12/23/2016
Leadership Changes
None.
Committee Structure Changes
None.
Ballot Results
Document #
Document Title
Committee Action
A&R Forms for Approved Ballots
6042
LINE ITEM REVISION OF SEMI MF1763-0706 (Reapproved 1111)
TEST METHOD FOR MEASURING CONTRAST OF A LINEAR POLARIZER
LI1: Correct title and concomitant text
Failed
6042_Ballot report 20161215.pdf
6043
LINE ITEM REVISION OF SEMI MF28-0707 (Reapproved 0912)
TEST METHOD FOR MINORITY CARRIER LIFETIME IN BULK GERMANIUM AND SILICON BY MEASUREMENT OF PHOTOCONDUCTIVITY DECAY
LI1: Correct title and concomitant text
Passed
6043_Ballot report 20161215.pdf
6044
LINE ITEM REVISION OF SEMI MF673-1014
TEST METHOD
S
FOR MEASURING RESISTIVITY OF SEMICONDUCTOR WAFERS OR SHEET RESISTANCE OF SEMICONDUCTOR FILMS WITH A NONCONTACT EDDY-CURRENT GAUGE
LI1: Correct title and concomitant text
Passed
6044_Ballot report 20161215.pdf
6045
LINE ITEM REVISION OF SEMI MF928-1014
TEST METHOD
S
FOR EDGE CONTOUR OF CIRCULAR SEMICONDUCTOR WAFERS AND RIGID DISK SUBSTRATES
LI1: Correct title and concomitant text
Passed
6045_Ballot report 20161215.pdf
6046
Line Item Revision to SEMI MF1982-0714 Test Methods For Analyzing Organic Contaminants On Silicon Wafer Surfaces By Thermal Desorption Gas Chromatography
LI1:Correct title and concomitant text
Passed
6046_Ballot report 20161215.pdf
6047
Reapproval of SEMI MF728-1106 (Reapproved 1111) Practice for Preparing an Optical Microscope for Dimensional Measurements
Passed (super clean)
6047_Ballot report 20161215.pdf
6048
Reapproval of SEMI MF978-1106 (Reapproved 1111)Test Method for Characterizing Semiconductor Deep Levels by Transient Capacitance Techniques
Passed (super clean)
6048_Ballot report 20161215.pdf
Ratification Ballot Results
None.
Activities Approved by the GCS between meetings of TC Chapter meeting
None.
Authorized Activities
#
SC/TF/WG
Details
TBD
International AWG TF
Line Item Revision to SEMI M1-0416 and MF-1390-1014 to be consistency between these three documents for Bow Metrics and add illustration of Shape Metrics in M1.
*The SNARF will be submitted to GCS approval.
Authorized Ballots
#
When
TF
Details
5915
Cycle 2 or 3, 2017
International AWG
Line Item Revision to SEMI M1-0215, Addition to Related Information : Illustration of Flatness and Shape Metrics for Silicon Wafers
SNARF(s) Granted a One-Year Extension
None.
SNARF(s) Cancelled
None.
Standard(s) to receive Inactive Status
None.
Special Announcements of the Committee (Workshops, Programs, etc.)
None.
Next Meeting
None.
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