SEMI International Standards
SEMI New Activity Report Forms (SNARFs)
& SEMI Task Force Organization Forms (TFOFs)

Below you will find the TFOFs of all the task forces actively working in each region. The TFOF contains the charter and purpose of each task force.

The SNARFs that are listed under each task force are the individual activities of the task force. While the majority of these activities lead to the creation or revision of a standard, there are some activities which are focused on exploring and expanding the program.

If you have any further questions on a specific activity, contact your local Standards staff. A listing of global SEMI Standards staff can be found on the contact information page.

Blank forms
TFOF (DOC 70K)
SNARF (DOC 68K)

The listing of SNARFs and TFOFs below are sorted by Global Technical Committee, and then by the region that approved the TFOF.

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Hide details for 3DS-IC3DS-IC
Hide details for North AmericaNorth America
Hide details for 3DS-IC Bonded Wafer Stacks3DS-IC Bonded Wafer Stacks
5173 New Standard: Guide for Describing Silicon Wafers for Use in a 300 mm 3DS-IC Wafer Stack
5713 New Standard: SPECIFICATION FOR GLASS BASE MATERIAL FOR SEMICONDUCTOR PACKAGING
TFOF 3DS-IC Bonded Wafer Stacks
Hide details for 3DS-IC Inspection and Metrology3DS-IC Inspection and Metrology
5822 New Standard: Specification for Reference Material for Bonded Wafer Stack Void Metrology
5976 NEW STANDARD: Terminology for 3DS-IC Technology
TFOF 3DS-IC Inspection and Metrology
Hide details for TaiwanTaiwan
Hide details for 3DS IC Middle End Process Task Force3DS IC Middle End Process Task Force
TFOF 3DS IC Middle End Process Task Force
Hide details for 3DS IC Testing Task Force3DS IC Testing Task Force
TFOF 3DS IC Testing Task Force
Hide details for Middle-End ProcessMiddle-End Process
5688 New Standard: GUIDE FOR OVERLAY PERFORMANCE ASSESSMENT FOR 3DS-IC PROCESS
5800 New Standard: Guide for Wafer Edge Trimming for 3DS-IC Process
Hide details for Assembly & PackagingAssembly & Packaging
Hide details for JapanJapan
Hide details for Fiducial Mark Interoperability Task ForceFiducial Mark Interoperability Task Force
TFOF Fiducial Mark Interoperability Task Force
Hide details for JA 450mm Assembly and Test Die Preparation Task ForceJA 450mm Assembly and Test Die Preparation Task Force
TFOF JA 450mm Assembly and Test Die Preparation Task Force
Hide details for Packaging 5 Year Review Task ForcePackaging 5 Year Review Task Force
5881 Reapproval of SEMI G83-0912: SPECIFICATION FOR BAR CODE MARKING OF PRODUCT PACKAGES
6027 Line Item Revision to SEMI G86-0303 (Reapproved 0811): Test Method for Measurement of Chip (Die) Strength by Mean of 3-Point Bending
6029 Reapproval of SEMI G88-0211: Specification for Tape Frame for 450 mm Wafer
6030 Revision to SEMI G20-96: SPECIFICATION FOR LEAD FINISHES FOR PLASTIC PACKAGES (ACTIVE DEVICES ONLY)
6031 Revision to SEMI G21-0094: SPECIFICATION FOR PLATING INTEGRATED CIRCUIT LEADFRAMES
6032 Revision to SEMI G41-87: SPECIFICATION FOR DUAL STRIP SOIC LEADFRAME
TFOF Packaging 5 Year Review Task Force
Hide details for Thin Chip Handling Task ForceThin Chip Handling Task Force
5836 New Standard: Test Method for Adhesive Strength for Adhesive Tray Used for Thin Chip Handling
6028 Line Item Revision to SEMI G97-0116: SPECIFICATION FOR ADHESIVE TRAY USED FOR THIN CHIP HANDLING
TFOF Thin Chip Handling Task Force
Hide details for Automated Test EquipmentAutomated Test Equipment
Hide details for North AmericaNorth America
Hide details for NA ATE 5-Year ReviewNA ATE 5-Year Review
TFOF NA ATE 5-Year Review
Hide details for Standard Test Data Format (STDF) Task ForceStandard Test Data Format (STDF) Task Force
TFOF Standard Test Data Format (STDF) Task Force
Hide details for Test Cell CommunicationsTest Cell Communications
TFOF Test Cell Communications
Hide details for Automation TechnologyAutomation Technology
Hide details for EuropeEurope
Hide details for Equipment Interface Specification (EIS) Equipment Interface Specification (EIS)
5151 New Standard: Specification To Transfer Wafer Mark Reader Data To Host System (MES)
5154 New Subordinate Standard "Profibus implementation specification for a Horizontal Communication between equipment for crystalline photovoltaic fabrication system" (Parent Document: 4804 "SPECIFICATION FOR A HORIZONTAL COMMUNICATION BETWEEN EQUIPMENT FOR PHOTOVOLTAIC FABRICATION SYSTEM")
5339 Specification for Single Material Tracking and Tracing For Crystalline Silicon PV
5566 Line Item Revision to SEMI PV002-00-0709E Guide for PV Equipment Communication Interfaces (PVECI), modify requirement [PV02-RQ-00007-00] to allow implementation of new namelist requests instead of required documentation.
TFOF Equipment Interface Specification (EIS)
Hide details for PV Wafer Traceability Task Force PV Wafer Traceability Task Force
5418 Revision of SEMI PV29-0212, Specification for Front Surface Marking of PV Silicon Wafers with Two-Dimensional Matrix Symbols
5419 Revision of SEMI PV32-0312, Specification for Marking of PV Silicon Brick Face and PV Wafer Edge
TFOF PV Wafer Traceability Task Force
Hide details for GlobalGlobal
Hide details for Equipment Interface Specification (EIS)Equipment Interface Specification (EIS)
TFOF Equipment Interface Specification (EIS)
Hide details for Compound Semiconductor MaterialsCompound Semiconductor Materials
Hide details for EuropeEurope
Hide details for Contactless capacitive resistivity measurement of semi-insulating semiconductorsContactless capacitive resistivity measurement of semi-insulating semiconductors
TFOF Contactless capacitive resistivity measurement of semi-insulating semiconductors
Hide details for EU Compound Semiconductor Materials CommitteeEU Compound Semiconductor Materials Committee
TFOF EU Compound Semiconductor Materials Committee
Hide details for SiC Material and Wafer Specification TFSiC Material and Wafer Specification TF
4689 5-year review of SEMI M55, M55.1, and M55.2
6015 Line Item Revision SEMI M81-0611 - Guide to Defects Found in Monocrystalline Silicon Carbide Substrates (5 year review)
TFOF SiC Material and Wafer Specification TF
Hide details for North AmericaNorth America
Hide details for Gallium Nitride (GaN) Task ForceGallium Nitride (GaN) Task Force
TFOF Gallium Nitride (GaN) Task Force
Hide details for NA Compound Semiconductor Materials Committee 5-Year Review TFNA Compound Semiconductor Materials Committee 5-Year Review TF
5882 Line Item Revision to SEMI M10-1296, Standard Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide Wafers with title change to: Nomenclature for Identification of Structures and Features Seen on Gallium Arsenide Wafers
Correct nonconforming title per Procedure Manual, Appendix 4
5883 Line Item Revision to SEMI M42-0211, Specification for Compound Semiconductor Epitaxial Wafers
Move DIN standard reference from 'Referenced Standards and Documents' section to a new 'Related Documents' section.
5884 Line Item Revision to SEMI M65-0306E2, Specifications for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers with title change to: Specification for Sapphire Substrates to use for Compound Semiconductor Epitaxial Wafers
Correct nonconforming title per Procedure Manual, Appendix 4
5885 Line Item Revision to SEMI M75-0812, Specifications for Polished Monocrystalline Gallium Antimonide Wafers with title change to: Specification for Polished Monocrystalline Gallium Antimonide Wafers
Correct nonconforming title per Procedure Manual, Appendix 4
5886 Line Item Revisions to:
- SEMI M9-0914, Specifications for Polished Monocrystalline Gallium Arsenide Wafers with title change to: Specification for Polished Monocrystalline Gallium Arsenide Wafers

Correct nonconforming titles per Procedure Manual, Appendix 4
TFOF NA Compound Semiconductor Materials Committee 5-Year Review TF
Hide details for Silicon Carbide Task ForceSilicon Carbide Task Force
TFOF Silicon Carbide Task Force
Hide details for EH&SEH&S
Hide details for InternationalInternational
Hide details for S23 Revision Global Task ForceS23 Revision Global Task Force
5947 Revision to SEMI S23, Guide for Conservation of Energy, Utilities and Materials Used by Semiconductor Manufacturing Equipment. New Scope and Small Changes
Hide details for JapanJapan
Hide details for FPD System Safety Task ForceFPD System Safety Task Force
TFOF FPD System Safety Task Force
Hide details for GHG Emission Characterization Task ForceGHG Emission Characterization Task Force
TFOF GHG Emission Characterization Task Force
Hide details for Japan Environmental Health and Safety CommitteeJapan Environmental Health and Safety Committee
5972 Reapproval of SEMI S19-0311 Safety Guideline for Training of Manufacturing Equipment Installation, Maintenance and Service Personnel
TFOF Japan Environmental Health and Safety Committee
Hide details for S13 Revision Task ForceS13 Revision Task Force
TFOF S13 Revision Task Force
Hide details for S17 Revision Task ForceS17 Revision Task Force
TFOF S17 Revision Task Force
Hide details for SDRCM(S Documents REG-PG-SM Conformance Maintenance) TFSDRCM(S Documents REG-PG-SM Conformance Maintenance) TF
TFOF SDRCM(S Documents REG-PG-SM Conformance Maintenance) TF
Hide details for Seismic Protection Task ForceSeismic Protection Task Force
5556 Line Item Revisions to SEMI S2-0712, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Revisions Related to Section 19 Seismic Protection
TFOF Seismic Protection Task Force
Hide details for Japan and North AmericaJapan and North America
Hide details for S23 Revision Global Task ForceS23 Revision Global Task Force
TFOF S23 Revision Global Task Force
Hide details for North AmericaNorth America
Hide details for Control of Hazardous Energy (CoHE) Task ForceControl of Hazardous Energy (CoHE) Task Force
5957 Line Item Revision of S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. ( Re: Control of Hazardous Energy)
TFOF Control of Hazardous Energy (CoHE) Task Force
Hide details for Energetic Materials EHS Task ForceEnergetic Materials EHS Task Force
5761 New Standard: EHS Guideline for Use of Energetic Materials in Semiconductor R&D and Manufacturing Processes
TFOF Energetic Materials EHS Task Force
Hide details for Ergonomics Task ForceErgonomics Task Force
5917 Line Item Revisions to SEMI S8, Safety Guidelines for Ergonomics Engineering of Semiconductor Manufacturing Equipment. Addition of reference to a manual material-handling guide in SEMI-S8, Appendix 2, Lifting, Strength, and Materials Handling
5996 Line Item Revision to S8-0915, Safety Guideline for Ergonomics Engineering of Semiconductor Manufacturing Equipment
TFOF Ergonomics Task Force
Hide details for Fire Protection Task ForceFire Protection Task Force
5969 Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment (pertaining to Fire)
5970 Line Item Revisions to SEMI S14, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment (pertaining to alignment with SEMI S10 )
TFOF Fire Protection Task Force
Hide details for Lifting Equipment Task ForceLifting Equipment Task Force
TFOF Lifting Equipment Task Force
Hide details for Manufacturing Equipment Safety SubcommitteeManufacturing Equipment Safety Subcommittee
TFOF Manufacturing Equipment Safety Subcommittee
Hide details for NA Environmental Health and Safety CommitteeNA Environmental Health and Safety Committee
5590 Reapproval of SEMI S14-0309, Safety Guidelines for Fire Risk Assessment and Mitigation for Semiconductor Manufacturing Equipment
5825 Reapproval for SEMI E34-1110, Safety Guideline for Mass Flow Device Removal and Shipment
TFOF NA Environmental Health and Safety Committee
Hide details for S1 Revision Task ForceS1 Revision Task Force
5623 Revision to SEMI S1, Safety Guideline for Equipment Safety Labels
TFOF S1 Revision Task Force
Hide details for S10 Task ForceS10 Task Force
TFOF S10 Task Force
Hide details for S2 Chemical Exposure Task ForceS2 Chemical Exposure Task Force
4683 Revisions to SEMI S2 related to chemical exposure
5624 Revision to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Changes related to representative sampling
TFOF S2 Chemical Exposure Task Force
Hide details for S2 Interlock and Safety Control Systems Reliability SelectionS2 Interlock and Safety Control Systems Reliability Selection
TFOF S2 Interlock and Safety Control Systems Reliability Selection
Hide details for S2 Ladders & Steps Task ForceS2 Ladders & Steps Task Force
TFOF S2 Ladders & Steps Task Force
Hide details for S2 Non-Ionizing Radiation Task ForceS2 Non-Ionizing Radiation Task Force
5625 Line Item Revisions to SEMI S2, Environmental, Health, and Safety Guideline for Semiconductor Manufacturing Equipment. Delayed Revisions Related to Non-Ionizing Radiation
TFOF S2 Non-Ionizing Radiation Task Force
Hide details for S22 Task ForceS22 Task Force
TFOF S22 Task Force
Hide details for S6 Revision Task ForceS6 Revision Task Force
4975 Revision to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment (Line item revisions for addressing gas detectors and other concerns)
5681 Revision to SEMI S6, EHS Guideline for Exhaust Ventilation of Semiconductor Manufacturing Equipment
TFOF S6 Revision Task Force
Hide details for S7 Task ForceS7 Task Force
TFOF S7 Task Force
Hide details for Seismic Liaison Task ForceSeismic Liaison Task Force
TFOF Seismic Liaison Task Force
Hide details for TaiwanTaiwan
Hide details for  LED Safety Task Force LED Safety Task Force
TFOF LED Safety Task Force
Hide details for Environmental Sustainability Task ForceEnvironmental Sustainability Task Force
TFOF Environmental Sustainability Task Force
Hide details for Gas and Chemical Safety Task ForceGas and Chemical Safety Task Force
4807 New Standard: Safety Guideline for Hydrogen Handling
TFOF Gas and Chemical Safety Task Force
Hide details for PV Safety Task ForcePV Safety Task Force
TFOF PV Safety Task Force
Hide details for Seismic Task ForceSeismic Task Force
TFOF Seismic Task Force
Hide details for FacilitiesFacilities
Hide details for JapanJapan
Hide details for 5-year-review TF5-year-review TF
TFOF 5-year-review TF
Hide details for F1 Revision TFF1 Revision TF
TFOF F1 Revision TF
Hide details for Gas Box Components Joint Task ForceGas Box Components Joint Task Force
TFOF Gas Box Components Joint Task Force
Hide details for Japan Gases and Facilities CommitteeJapan Gases and Facilities Committee
TFOF Japan Gases and Facilities Committee
Hide details for KoreaKorea
Hide details for Equipment Cleanness Task Force Equipment Cleanness Task Force
4922 New Standard: Guide for Equipment Fan Filter Unit (EFFU) Performance
TFOF Equipment Cleanness Task Force
Hide details for North AmericaNorth America
Hide details for Building Information Modeling (BIM) for Semiconductor Capital Equipment Task ForceBuilding Information Modeling (BIM) for Semiconductor Capital Equipment Task Force
5155 New Standard: Guide for Facilities Data Package for Semiconductor Equipment Installation
TFOF Building Information Modeling (BIM) for Semiconductor Capital Equipment Task Force
Hide details for NA Facilities CommitteeNA Facilities Committee
5570 Reapproval of SEMI E51-0200, Guide for Typical Facilities Services and Termination Matrix
5572 Reapproval of SEMI E6-0303, Guide for Semiconductor Equipment Installation Documentation
TFOF NA Facilities Committee
Hide details for SEMI F51 Revision Task ForceSEMI F51 Revision Task Force
TFOF SEMI F51 Revision Task Force
Hide details for Flat Panel Display (FPD) - Materials & ComponentsFlat Panel Display (FPD) - Materials & Components
Hide details for JapanJapan
Hide details for Backlight TFBacklight TF
TFOF Backlight TF
Hide details for Color Filter Depolarization Effect TFColor Filter Depolarization Effect TF
TFOF Color Filter Depolarization Effect TF
Hide details for Flexible Display Task ForceFlexible Display Task Force
5551 New Standard: Measurement Method of Water Vapor Transmission Rate for Plastic Films and Sheets with High Barrier Properties for Electronic Devices
5977 New Standard, Test Method of Water Vapor Barrier Property for Plastic Films with High Barrier for Electronic Devices
TFOF Flexible Display Task Force
Hide details for FPD Color Filter Task ForceFPD Color Filter Task Force
TFOF FPD Color Filter Task Force
Hide details for FPD Mask Task ForceFPD Mask Task Force
6011 Reapproval of SEMI D38-0211, Guide for Quality Area of LCD Masks
6013 Reapproval of SEMI D6-0211, Specification for Liquid Crystal Display (LCD) Mask Substrates
TFOF FPD Mask Task Force
Hide details for Japan FPD Materials and Components CommitteeJapan FPD Materials and Components Committee
TFOF Japan FPD Materials and Components Committee
Hide details for Large Size Mask Task ForceLarge Size Mask Task Force
TFOF Large Size Mask Task Force
Hide details for Polarizing Film TFPolarizing Film TF
5555 Revision to SEMI D50-0707, Test Method for Surface Hardness of FPD Polarizing Film with title change to: Test Method for Surface Hardness of FPD components
6006 New Standard: Test method for measurements of dimension of films for FPD – contour
matching method
6010 Reapproval of SEMI D34-0710, Test Method for FPD Polarizing Films
6012 Reapproval of SEMI D39-0704 (Reapproved 0710), Specification for Markers on FPD Polarizing
6014 Revision to SEMI D60-0710: Test Method of Surface Scratch Resistance for FPD Polarizing
Film and Its Materials
TFOF Polarizing Film TF
Hide details for Flat Panel Display (FPD) - MetrologyFlat Panel Display (FPD) - Metrology
Hide details for JapanJapan
Hide details for D31 Revision Task ForceD31 Revision Task Force
TFOF D31 Revision Task Force
Hide details for KoreaKorea
Hide details for Perceptual Image QualityPerceptual Image Quality
5634 New Standard, Test Method for Color Reproduction and Perceptual Contrast of Displays
TFOF Perceptual Image Quality
Hide details for Perceptual Viewing AnglePerceptual Viewing Angle
5633 New Standard, Test Method for Viewing Angle Characteristic using Mixed Color on Visual Displays
TFOF Perceptual Viewing Angle
Hide details for Transparent DisplayTransparent Display
5337 New Standard: Test Method for Optical Characteristics of Transparent Display
TFOF Transparent Display
Hide details for TaiwanTaiwan
Hide details for Ambient Color Gamut Task ForceAmbient Color Gamut Task Force
5291 New Standard: Test Method of Ambient Color Gamut for FPD in Indoor Environments
TFOF Ambient Color Gamut Task Force
Hide details for e-Paper Display Task Forcee-Paper Display Task Force
4999 New Standard: Test Methods for Optical Properties of Electronic Paper Displays
5533 New Standard: Test Methods for Color Properties of Electronic Paper Displays
TFOF e-Paper Display Task Force
Hide details for Flexible Displays Task ForceFlexible Displays Task Force
5948 New Standard: Guide for Mechanical Stress Test Methods in the Measurement of Gas Barrier Performance for Flexible Display Components and Devices under a Normal Usage Condition
5949 New Standard: Test Method of Flicker Measurement for Flexible Displays
TFOF Flexible Displays Task Force
Hide details for Touch Screen Panel Task ForceTouch Screen Panel Task Force
5149 New Standard: Terminology of Touch Screen Panel
5293 New Standard: Test Method for Positional Accuracy of Touchscreen Pane
TFOF Touch Screen Panel Task Force
Hide details for GasesGases
Hide details for EuropeEurope
Hide details for Permeation Tubes for Trace Moisture CalibrationPermeation Tubes for Trace Moisture Calibration
5765 Revision to SEMI C15, Test Method for ppm and ppb Humidity Standards
TFOF Permeation Tubes for Trace Moisture Calibration
Hide details for JapanJapan
Hide details for Live Gas Flow Rate Task ForceLive Gas Flow Rate Task Force
TFOF Live Gas Flow Rate Task Force
Hide details for North AmericaNorth America
Hide details for Filters and Purifiers Task ForceFilters and Purifiers Task Force
5244 Revision of SEMI F21-1102, Classification of Airborne Molecular Contaminant Levels in Clean Environments
5816 Line Item Revision to SEMI F30-0710: Start-Up and Verification of Purifier Performance Testing for Trace Gas Impurities and Particles at an Installation Site
TFOF Filters and Purifiers Task Force
Hide details for Gases Specification Task ForceGases Specification Task Force
5997 Line Item Revision to SEMI C3-0413, Specifications for Gases
5998 Line Item Revision to SEMI C54-1103 (Reapproved 0211), Specifications and Guidelines for Oxygen
5999 Line Item Revision to SEMI C56-0305 (Reapproved 0211), Specifications and Guidelines for Dichlorosilane (SiH2Cl2)
6000 Line Item Revision to SEMI C57-0305 (Reapproved 0211), Specifications and Guidelines for Argon
6001 Line Item Revision to SEMI C58-1213, Specifications for Hydrogen
6002 Line Item Revision to SEMI C59-1104 (Reapproved 0211), Specifications and Guidelines for Nitrogen
6003 Line Item Revision to SEMI C60-0305 (Reapproved 0211), Specifications and Guidelines for Nitrous Oxide (N2O)
6004 Line Item Revision to SEMI C70-0611, Specifications for Tungsten Hexafluoride (WF6)
TFOF Gases Specification Task Force
Hide details for Heater Jacket Task ForceHeater Jacket Task Force
TFOF Heater Jacket Task Force
Hide details for Mass Flow Controller Task ForceMass Flow Controller Task Force
5963 LINE ITEM REVISION TO SEMI F62-0701 (Reapproved 1111)
TEST METHOD FOR DETERMINING MASS FLOW CONTROLLER PERFORMANCE CHARACTERISITICS FROM AMBIENT AND GAS TEMPERATURE EFFECTS
5964 LINE ITEM REVISION TO SEMI E56-0815 TEST METHOD FOR DETERMINING ACCURACY, LINEARITY, REPEATABILITY, SHORT-TERM REPRODUCIBILITY, HYSTERESIS, AND DEAD BAND OF THERMAL MASS FLOW CONTROLLERS
TFOF Mass Flow Controller Task Force
Hide details for Materials of Construction of Gas Delivery Systems Task ForceMaterials of Construction of Gas Delivery Systems Task Force
5876 New Standard - Test Method for Determining the Critical Pitting Temperature of Stainless Steel Surfaces Used In Corrosive Gas Systems by Use of a Ferric Chloride Solution
TFOF Materials of Construction of Gas Delivery Systems Task Force
Hide details for Pressure Measurement Task ForcePressure Measurement Task Force
3440 Test Method for Pressure Measurement Devices
TFOF Pressure Measurement Task Force
Hide details for Surface Mount Sandwich Component Dimensions Task ForceSurface Mount Sandwich Component Dimensions Task Force
TFOF Surface Mount Sandwich Component Dimensions Task Force
Hide details for HB-LEDHB-LED
Hide details for ChinaChina
Hide details for GaN based LED Epitaxial Wafer Task ForceGaN based LED Epitaxial Wafer Task Force
5776 New Standard: Test Method for Detecting Surface Defects of GaN based LED Epitaxial Wafer Used for Manufacturing HB-LED
TFOF GaN based LED Epitaxial Wafer Task Force
Hide details for Sapphire Single Crystal Ingot Task ForceSapphire Single Crystal Ingot Task Force
5775 New Standard: Specification for Sapphire Single Crystal Ingot Intended for Use for Manufacturing HB-LED Wafers
TFOF Sapphire Single Crystal Ingot Task Force
Hide details for Sapphire Single Crystal Orientation Task Force Sapphire Single Crystal Orientation Task Force
5945 New Standard: Test Method for Determining Orientation of A Sapphire Single Crystal
TFOF Sapphire Single Crystal Orientation Task Force
Hide details for Single Crystal Sapphire Task ForceSingle Crystal Sapphire Task Force
5629 New Standard, Guide for Identification Defects on Bare Surfaces of Sapphire Wafers
5723 New Standard: Specification for Single Crystal Sapphire Intended for Use for Manufacturing HB- LED Wafers
5946 New Standard: Test Method for Grain Boundary of Single Crystal Sapphire by Optical Homogeneity Technique (OHT)
TFOF Single Crystal Sapphire Task Force
Hide details for North AmericaNorth America
Hide details for HB-LED AssemblyHB-LED Assembly
TFOF HB-LED Assembly
Hide details for HB-LED Equipment Automation InterfacesHB-LED Equipment Automation Interfaces
TFOF HB-LED Equipment Automation Interfaces
Hide details for HB-LED Equipment Communication Interfaces TFHB-LED Equipment Communication Interfaces TF
TFOF HB-LED Equipment Communication Interfaces TF
Hide details for HB-LED Source Materials TFHB-LED Source Materials TF
5984 New Standard: Guide for Biscyclopentadienylmagnesium for HB-LED Manufacturing
5985 New Standard: Guide for Triethylgallium for HB-LED Manufacturing
5986 New Standard: Guide for Trimethylaluminum for HB-LED Manufacturing
5987 New Standard: Guide for Trimethylgallium for HB-LED Manufacturing
5988 New Standard: Guide for Trimethylindium for HB-LED Manufacturing
TFOF HB-LED Source Materials TF
Hide details for HB-LED Wafer TFHB-LED Wafer TF
TFOF HB-LED Wafer TF
Hide details for Impurities and Defects in HB-LED Sapphire WafersImpurities and Defects in HB-LED Sapphire Wafers
TFOF Impurities and Defects in HB-LED Sapphire Wafers
Hide details for Patterned Sapphire Substrate (PSS) TFPatterned Sapphire Substrate (PSS) TF
TFOF Patterned Sapphire Substrate (PSS) TF
Hide details for Test Methods TFTest Methods TF
5016 Line Item Revision to SEMI HB3-1113, Mechanical Interface Specification for 150 mm HB-LED Load Port
TFOF Test Methods TF
Hide details for Information & ControlInformation & Control
Hide details for EuropeEurope
Hide details for Process Control Solutions (PCS) Process Control Solutions (PCS)
TFOF Process Control Solutions (PCS)
Hide details for JapanJapan
Hide details for Equipment Information System Security (EISS) Task ForceEquipment Information System Security (EISS) Task Force
TFOF Equipment Information System Security (EISS) Task Force
Hide details for Fiducial Mark Interoperability Task ForceFiducial Mark Interoperability Task Force
TFOF Fiducial Mark Interoperability Task Force
Hide details for GEM 300 Task ForceGEM 300 Task Force
5601 New Standard: Specification for Wafer Job Management
5829 Line Item Revision to SEMI E171-0515 “Specification for Predictive Carrier Logistics (PCL)”
5973 Line Item Revision to SEMI E170-0416: SPECIFICATION FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM (SFORMS) and SEMI E170.1-0416: SPECIFICATION FOR SECS-II PROTOCOL FOR SECURED FOUNDATION OF RECIPE MANAGEMENT SYSTEM
TFOF GEM 300 Task Force
Hide details for Information & Control CommitteeInformation & Control Committee
6034 Reapproval of SEMI E54.21-1110 Specification for Sensor Actuator Network for Motionnet Communication
6036 Reapproval of SEMI E153-0310: Specification for AMHS SEM (AMHS SEM)
Hide details for JA I&CC Maintenance Task ForceJA I&CC Maintenance Task Force
6033 Line item revision to “SEMI E99-1104E (Reapproved 0710) The Carrier ID Reader/Writer Functional Standard: Specification of Concepts, Behavior, and Services” and
“SEMI E99.1-1104 (Reapproved 0710) Specification for SECS-I and SECS-II Protocol for Carrier ID Reader/Writer Functional Standard”
6035 Line Item Revision to SEMI E91-0600 (Reapproved 1109), Specification for Prober Specific Equipment Model (PSEM)
TFOF JA I&CC Maintenance Task Force
Hide details for KoreaKorea
Hide details for Diagnostic Data Acquisition Task ForceDiagnostic Data Acquisition Task Force
TFOF Diagnostic Data Acquisition Task Force
Hide details for GEM 300 Task ForceGEM 300 Task Force
4946 Line Item Revision to SEMI E87-0709, Specification for Carrier Management (CMS), Adding Carrier Ready to Unload Prediction Feature
5738 Revision to E87.1, Specification for SECS-II Protocol for Carrier Management (CMS)
5832 New Standard, Specification for Generic Counter Model
5833 New Standard, Specification for Maintenance Program Model
TFOF GEM 300 Task Force
Hide details for North AmericaNorth America
Hide details for Diagnostic Data Acquisition Task Force NADiagnostic Data Acquisition Task Force NA
5677 Revision to SEMI E164, Specification for EDA Common Metadata
6008 New Auxiliary Information: Equipment Data Acquisition (EDA) Freeze Version Overview
6009 Line Item Revision to Specifications E132, E132.1
6022 Line Item Revision to SEMI E138-0709 - XML Semiconductor Common Components to correct nonconforming title
TFOF Diagnostic Data Acquisition Task Force NA
Hide details for Energy Saving Equipment Communication Task ForceEnergy Saving Equipment Communication Task Force
5821 New Standard: Specification for Energy Savings Mode Communication between Semiconductor Equipment and Sub-Systems
TFOF Energy Saving Equipment Communication Task Force
Hide details for GEM 300 Task ForceGEM 300 Task Force
5549 Revision to SEMI E30, Generic Model for Communications and Control of Manufacturing Equipment (GEM) with title change to: Specification for the Generic Model for Communications and Control of Manufacturing Equipment (GEM)
5589 Revisions to:
- SEMI E5, SEMI Equipment Communications Standard 2 Message Content (SECS-II);
- SEMI E40.1, SECS-II Support for Processing Management Standard;
- SEMI E90.1, Specification for SECS-II Protocol Substrate Tracking;
- SEMI E94.1, Specification for SECS-II Protocol for Control Job Management (CJM);
- SEMI E109, Specification for Reticle and Pod Management (RPMS);
- SEMI E109.1, Specification for SECS-II Protocol for Reticle and Pod Management (RPMS); and
- SEMI E116.1, Specification for SECS-II Protocol for Equipment Performance Tracking (EPT);
5618 New Standard: Specification for Preservation of Recipe Integrity
5872 Line Item Revisions to SEMI E172, Specification for SECS Equipment Data Dictionary (SEDD)
5912 Line Item Revisions to:
- SEMI E142.1 -0211, XML Schema for Substrate Mapping
- SEMI E142.2-0211, SECS II Protocol for Substrate Mapping
- SEMI E142.3-0211, Web Services for Substrate Mapping
To correct nonconforming titles
5913 Reapproval for SEMI E157-0611, Specification for Module Process Tracking
5966 Line Item Revision to E90 (SPECIFICATION FOR SUBSTRATE TRACKING),
E90.1 (SPECIFICATION FOR SECS-II PROTOCOL SUBSTRATE TRACKING)
6005 Line Item Revision to SEMI E30 Generic Model for Communications and Control of Manufacturing Equipment (GEM)
6020 Line Item Revision to SEMI E30.1-0309: Inspection and Review Specific Equipment Model (ISEM) to correct nonconforming title
6021 Line Item Revision to SEMI E123-0703 (Reapproved 1109) - Standard for Handler Equipment Specific Equipment Model (HSEM) to correct nonconforming title
6023 Line Item Revision to SEMI E122-0703 (Reapproved 1109) - Standard for Tester Equipment Specific Equipment Model (TSEM) to correct nonconforming title
6024 Reapproval of SEMI E30.5-0302 (Reapproved 0308) - Specification for Metrology Specific Equipment Model (MSEM)
6025 Reapproval of SEMI E142-0211 - Specification for Substrate Mapping
TFOF GEM 300 Task Force
Hide details for NA Information and Control CommitteeNA Information and Control Committee
5679 Reapproval for SEMI E91, Specification for Prober Specific Equipment Model (PSEM)
5763 Reapproval for SEMI E30.5, Specification for Metrology Specific Equipment Model (MSEM)
5764 Reapprovals for SEMI E130, Specification for Prober Specific Equipment Model for 300 mm Environment (PSEM300) and SEMI E130.1, Specification for SECS-II Protocol for Prober Specific Equipment Model for 300 mm Environment (PSEM300)
6026 Reapproval of SEMI E109-1110 - Specification for Reticle and Pod Management (RPMS)
TFOF NA Information and Control Committee
Hide details for Process Control System NAProcess Control System NA
5716 Revisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS)
5967 Line Item Revisions to SEMI E133, Specification for Automated Process Control Systems Interface and SEMI E133.1, Provisional Specification for XML Messaging for Process Control Systems (PCS): Adding Virtual Metrology (VM) specifications
TFOF Process Control System NA
Hide details for Sensor Bus Task ForceSensor Bus Task Force
5274 New SEMI E54 Subordinate Standard: Specification for Sensor/Actuator Network
Specific Device Model for Generic Equipment add-on Sensor (ADDON)
5844 Line Item Revision to SEMI E54 Primary Standard and Subordinate Standards to correct nonconforming titles
5914 Reapproval for SEMI E54.3-0698 (Reapproved 1110), Specification for Sensor/Actuator Network Specific Device Model for Mass Flow Device
TFOF Sensor Bus Task Force
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Hide details for Backend Factory Integration Task ForceBackend Factory Integration Task Force
TFOF Backend Factory Integration Task Force
Hide details for Equipment Information Integration Task ForceEquipment Information Integration Task Force
TFOF Equipment Information Integration Task Force
Hide details for GEM300 Task Force GEM300 Task Force
TFOF GEM300 Task Force
Hide details for Liquid ChemicalsLiquid Chemicals
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Hide details for EU Gases and Liquid Chemicals CommitteeEU Gases and Liquid Chemicals Committee
TFOF EU Gases and Liquid Chemicals Committee
Hide details for Precursor Specifications Task ForcePrecursor Specifications Task Force
5656 Revision to SEMI C65-0308, Guide for Trimethylsilane (3MS), 99.995% Quality
5657 Revision to SEMI C66-0308, Guide for Trimethylaluminium (TMAI), 99.5% Quality
5658 New Standard: Guide for PENTAKIS(DIMETHYLAMINO) TANTALUM (PDMAT)
TFOF Precursor Specifications Task Force
Hide details for Solvents in Advanced ProcessesSolvents in Advanced Processes
5495 New Standard: Guide for Cyclo Hexanone
TFOF Solvents in Advanced Processes
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Hide details for Diaphragm Valves Task ForceDiaphragm Valves Task Force
TFOF Diaphragm Valves Task Force
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TFOF Liquid-Borne Particle Counter Task Force
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TFOF Welding Fitting Task Force
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4957 Revision to SEMI C41-0705, Specifications and Guidelines for 2-Propanol, with title change to: Specifications for 2-Propanol
5642 Revision to SEMI C35-0708, Specifications and Guideline for Nitric Acid with title change to: Specification and Guide for Nitric Acid
5809 Line item revision to SEMI C69-0611, Test Method for the Determination of Surface Areas of Polymer Pellets
5831 Revision to SEMI C27-0708, Specifications and Guideline for Hydrochloric Acid with title change to: Specification and Guide for Hydrochloric Acid
5991 New Standard: Test Method for Determining Density of Chemical Mechanical Polish (CMP) Slurries
TFOF Analytical Methods Task Force
Hide details for Determining Roughness of Polymer Surfaces Task ForceDetermining Roughness of Polymer Surfaces Task Force
TFOF Determining Roughness of Polymer Surfaces Task Force
Hide details for E49.2 / E49.7 Review/RewriteE49.2 / E49.7 Review/Rewrite
5943 Revision to SEMI E49.2-1104, Guide for the Qualification of Polymer Assemblies Used in Ultrapure Water and Liquid Chemical Systems in Semiconductor Process Equipment with title change
TFOF E49.2 / E49.7 Review/Rewrite
Hide details for E49.4 / E49.5 EvaluationE49.4 / E49.5 Evaluation
5942 Revision to SEMI E49.4-0298, Guide for High Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment
5978 Revision to SEMI E49.5-1104, Guide for Ultrahigh Purity Solvent Distribution Systems in Semiconductor Manufacturing Equipment
TFOF E49.4 / E49.5 Evaluation
Hide details for F104 Rewrite TaskForceF104 Rewrite TaskForce
5416 Revision of SEMI F104-0312, Particle Test Method Guide for Evaluation of Components Used in Ultrapure Water and Liquid Chemical Distribution Systems
Hide details for F63 Revision Task ForceF63 Revision Task Force
5944 Revision to SEMI F63-0213, Guide for Ultrapure Water Used in Semiconductor Processing
TFOF F63 Revision Task Force
Hide details for High Purity Liquid Assemblies & SystemsHigh Purity Liquid Assemblies & Systems
5992 Revision to SEMI F41-0699, Guide for Qualification of a Bulk Chemical Distribution System Used in Semiconductor Processing
TFOF High Purity Liquid Assemblies & Systems
Hide details for High Purity Materials and Components Task ForceHigh Purity Materials and Components Task Force
TFOF High Purity Materials and Components Task Force
Hide details for SEMI F40 Rewrite Task ForceSEMI F40 Rewrite Task Force
5527 Revision to SEMI F40-0699E, Practice for Preparing Liquid Chemical Distribution Components for Chemical Testing
5810 New Standard: Test Method for Testing PFA Materials Used In Liquid Chemical Distribution Systems
TFOF SEMI F40 Rewrite Task Force
Hide details for SEMI IX Resin TFSEMI IX Resin TF
5621 New Standard: Guide for Determining Ion Exchange Resin Contamination Contribution in High Purity Applications
TFOF SEMI IX Resin TF
Revision to SEMI C93-0216: Guide for Determining Ion Exchange Resin Contamination Contribution in High Purity Applications (Revise from Preliminary Standard into Full-consensus Standard)
Hide details for Ultra Pure Water Filtration Efficiency Task ForceUltra Pure Water Filtration Efficiency Task Force
TFOF Ultra Pure Water Filtration Efficiency Task Force
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Hide details for TerminologyTerminology
TFOF Terminology
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Hide details for MEMS Material CharacterizationMEMS Material Characterization
6007 New Standard: Specification for a Test Pattern for Deep Reactive Ion Etching (DRIE) Process Characterization
TFOF MEMS Material Characterization
Hide details for MEMS MicrofluidicsMEMS Microfluidics
5267 New Standard: Specification for Microfluidic Port and Pitch Dimensions
TFOF MEMS Microfluidics
Hide details for MEMS PackagingMEMS Packaging
TFOF MEMS Packaging
Hide details for MEMS ReliabilityMEMS Reliability
TFOF MEMS Reliability
Hide details for MEMS Substrate TFMEMS Substrate TF
6018 New Standard: Specification for Silicon Substrates used in fabrication of MEMS Devices
TFOF MEMS Substrate TF
Hide details for NA MEMS / NEMS Committee for 5-Year ReviewNA MEMS / NEMS Committee for 5-Year Review
TFOF NA MEMS / NEMS Committee for 5-Year Review
Hide details for Wafer BondWafer Bond
TFOF Wafer Bond
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Hide details for Cycle Time Metrics Task ForceCycle Time Metrics Task Force
4704 Definition of Active Time and Wait Time
TFOF Cycle Time Metrics Task Force
Hide details for North AmericaNorth America
Hide details for EMC Task ForceEMC Task Force
5596 New Standard: Guide To Assess and Minimize Electromagnetic Interference (EMI) in a Semiconductor Manufacturing Environment
6017 Line-item Revision to SEMI E33-1012 Guide for Semiconductor Manufacturing Equipment Electromagnetic Compatibility (EMC)
TFOF EMC Task Force
Hide details for Equipment Cost of Ownership TFEquipment Cost of Ownership TF
TFOF Equipment Cost of Ownership TF
Hide details for Equipment RAMP (Reliability, Availability, Maintainability, and Productivity) Metrics Task ForceEquipment RAMP (Reliability, Availability, Maintainability, and Productivity) Metrics Task Force
TFOF Equipment RAMP (Reliability, Availability, Maintainability, and Productivity) Metrics Task Force
Hide details for Equipment Training and Documentation Task ForceEquipment Training and Documentation Task Force
TFOF Equipment Training and Documentation Task Force
Hide details for ESD/ESC Task Force- N.AESD/ESC Task Force- N.A
TFOF ESD/ESC Task Force- N.A
Hide details for North America Metrics Technical CommitteeNorth America Metrics Technical Committee
TFOF North America Metrics Technical Committee
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Hide details for 5-year-review Task Force5-year-review Task Force
TFOF 5-year-review Task Force
Hide details for Mask Data Format for Mask Tools TFMask Data Format for Mask Tools TF
5366 Revision to SEMI P45-0211, SPECIFICATION FOR JOB DECK DATA FORMAT FOR MASK TOOLS
TFOF Mask Data Format for Mask Tools TF
Hide details for North AmericaNorth America
Hide details for Data PathData Path
5906 Line Item Revision to SEMI P39, OASIS (TM) - Open Artwork System Interchange Standard to correct nonconforming title
TFOF Data Path
Hide details for EUV Mask Task ForceEUV Mask Task Force
5907 Revision to SEMI P5-0704, Specification for Pellicles to include material for EUV pellicle
TFOF EUV Mask Task Force
Hide details for EUV Reticle Fiducial Mark Task ForceEUV Reticle Fiducial Mark Task Force
TFOF EUV Reticle Fiducial Mark Task Force
Hide details for Mask Orders Task ForceMask Orders Task Force
TFOF Mask Orders Task Force
Hide details for NA Microlithography Committee for 5-Year ReviewNA Microlithography Committee for 5-Year Review
5908 Reapproval for SEMI P40, Specification for Mounting Requirements for Extreme Ultraviolet Lithography Masks
5909 Reapproval for SEMI P48, Specification of Fiducial Marks for EUV Mask Blank
TFOF NA Microlithography Committee for 5-Year Review
Hide details for PhotovoltaicPhotovoltaic
Hide details for ChinaChina
Hide details for Crystalline Silicon Solar Cell Task ForceCrystalline Silicon Solar Cell Task Force
5842 New Standard: Test Method for Metal-Wrap-Through Solar Cell Via Resistance
TFOF Crystalline Silicon Solar Cell Task Force
Hide details for Multi-wire Saws Task ForceMulti-wire Saws Task Force
TFOF Multi-wire Saws Task Force
Hide details for PV DIFFUSION FURNACE TEST METHOD TASK FORCEPV DIFFUSION FURNACE TEST METHOD TASK FORCE
5983 New Standard: Test Method for In-line Sheet Resistance Inspection
Hide details for PV Diffusion Furnace Test Methods TFPV Diffusion Furnace Test Methods TF
5841 New Standard: Guide for Specifying Low Pressure Horizontal Diffusion Furnace
Hide details for PV Diffusion Furnace Test Methods TF PV Diffusion Furnace Test Methods TF
TFOF PV Diffusion Furnace Test Methods TF
Hide details for PV Module Task ForcePV Module Task Force
5661 New Standard: Test Method for Electrical Parameters of Bifacial Solar Module
5725 New Standard: Practice for Metal Wrap Through (MWT) Back Contact PV Module Assembly
5768 New Standard: Specification for Testing Requirements of Electroluminescence Defect Detection System for Crystalline Silicon PV Modules
5773 New Standard: Test Method for Cell Defects in Crystalline Silicon PV Modules by Using Electroluminescence
5830 New Standard: Classification for Electroluminescence Inspection of Crystalline Silicon Photovoltaic Modules
5840 New Standard: Guide for Calibration of PV Module UV Test Chambers
5925 New Standard: Specification for Dual-glass Module with Crystalline Silicon Terrestrial Solar Cell
5968 New Standard: Guide for Sample Preparation Method for Photovoltaic Backsheet Performance Tests
5982 New Standard: Specification for Crystalline Silicon Photovoltaic Module Dimensions
TFOF PV Module Task Force
Hide details for PV Silicon Raw Materials Task ForcePV Silicon Raw Materials Task Force
5699 New Standard:Test Method for Interstitial Atomic Oxygen Content of Crystalline Silicon by Multiple Transmission-reflection Infrared Absorption
5700 New Standard:Test Method for Substituted Carbon Content of Crystalline Silicon by Multiple Transmission-reflection Infrared Absorption
TFOF PV Silicon Raw Materials Task Force
Hide details for PV Silicon Wafer Task ForcePV Silicon Wafer Task Force
5767 New Standard: Guide for Material Requirements of Internal Feeders Used in Mono-crystal Silicon Growers
5843 Revision of SEMI PV22-1011, Specification for Silicon Wafers for Use in Photovoltaic Solar Cells
5927 Revision of SEMI PV22-1011, Specification for Silicon Wafers for Use in Photovoltaic Solar Cells
TFOF PV Silicon Wafer Task Force
Hide details for Thin Film PV Module Task ForceThin Film PV Module Task Force
5926 New Standard:Test Method for Bending Property of Flexible Thin Film PV Modules
TFOF Thin Film PV Module Task Force
Hide details for TaiwanTaiwan
Hide details for Building Integrated Photovoltaic (BIPV) Task ForceBuilding Integrated Photovoltaic (BIPV) Task Force
5560 New Standard: Classification of Building Integrated Photovoltaic (BIPV)
TFOF Building Integrated Photovoltaic (BIPV) Task Force
Hide details for Organic and Dye Sensitized Solar Cell Task ForceOrganic and Dye Sensitized Solar Cell Task Force
5598 New Standard: Test Method for Durability of Low Light Intensity Organic Photovoltaic (OPV) and Dye-Sensitized Solar Cell (DSSC)
5647 New Standard: Test Method for Spectrum Response (SR) Measurement of Dye Sensitized Solar Cell (DSSC)
5979 New Standard: Specification of indoor lighting simulator requirements for emerging PV
5980 New Standard: Test method of current-voltage (I-V) measurement in indoor lighting for DSC and OPV
TFOF Organic and Dye Sensitized Solar Cell Task Force
Hide details for PV Package Performance Task ForcePV Package Performance Task Force
TFOF PV Package Performance Task Force
Hide details for PV Reliability Test Method Task Force PV Reliability Test Method Task Force
5739 New Standard: Test Method to Evaluate an Accelerated Thermo Humidity Resistance of PV Encapsulants
5740 New Standard: Test method of electrochemical corrosion for PV module
TFOF PV Reliability Test Method Task Force
Hide details for PV wafer measurement method Task ForcePV wafer measurement method Task Force
TFOF PV wafer measurement method Task Force
Hide details for Photovoltaic (PV) - MaterialsPhotovoltaic (PV) - Materials
Hide details for EuropeEurope
Hide details for International PV Analytical Test Methods, Metrology, and Inspection Task ForceInternational PV Analytical Test Methods, Metrology, and Inspection Task Force
5894 Line Item Revision to SEMI PV10, Test Method for Instrumental Neutron Activation Analysis (INAA) of Silicon
Hide details for PV Material Degradation Task ForcePV Material Degradation Task Force
5889 New Standard: Test Method on cell level for potential-induced degradation susceptibility of solar cells and module encapsulation materials
TFOF PV Material Degradation Task Force
Hide details for PV Silicon Materials Task ForcePV Silicon Materials Task Force
TFOF PV Silicon Materials Task Force
Hide details for JapanJapan
Hide details for Japan PV Materials Task ForceJapan PV Materials Task Force
6016 New Standard: Test Method for Exposure Durability of PV Cells to Acetic Acid Vapor
TFOF Japan PV Materials Task Force
Hide details for North AmericaNorth America
Hide details for International PV Analytical Test Methods, Metrology, and Inspection Task ForceInternational PV Analytical Test Methods, Metrology, and Inspection Task Force
5801 New Standard: Guide for the Planning, Implementing and Analyzing data from a Round Robin used to verify a Test Method
5902 Line Item of SEMI PV1-0211   Test Method for Measuring Trace Elements in Silicon Feedstock for Silicon Solar Cells by High-Mass Resolution Glow Discharge Mass Spectrometry
5959 Revision of SEMI PV25-1011 Test Method for Simultaneously Measuring Oxygen, Carbon, Boron And Phosphorus in Solar Silicon Wafers and Feedstock by Secondary Ion Mass Spectrometry
5960 Revision of SEMI PV21-1011 Guide for Silane (SiH4), Used in Photovoltaic Applications
5961 Revision of SEMI PV24-1011 Guide for Ammonia (NH3) in Cylinders, Used in Photovoltaic Applications
5962 Revision of SEMI PV26-1011 Guide for Hydrogen Selenide (H2Se) in Cylinders, Used in Photovoltaic Applications
TFOF International PV Analytical Test Methods, Metrology, and Inspection Task Force
Hide details for Physical Interfaces & CarriersPhysical Interfaces & Carriers
Hide details for EuropeEurope
Hide details for EU Equipment Automation Committee (Physical Interfaces & Carriers)EU Equipment Automation Committee (Physical Interfaces & Carriers)
TFOF EU Equipment Automation Committee (Physical Interfaces & Carriers)
Hide details for InternationalInternational
Hide details for Global PIC Maintenance Task ForceGlobal PIC Maintenance Task Force
TFOF Global PIC Maintenance Task Force
Hide details for International 450 mm Physical Interfaces & CarriersInternational 450 mm Physical Interfaces & Carriers
TFOF International 450 mm Physical Interfaces & Carriers
Hide details for International Reticle SMIF Pod and Load Port Interoperability Task ForceInternational Reticle SMIF Pod and Load Port Interoperability Task Force
TFOF International Reticle SMIF Pod and Load Port Interoperability Task Force
Hide details for JapanJapan
Hide details for Fiducial Mark Interoperability Task ForceFiducial Mark Interoperability Task Force
TFOF Fiducial Mark Interoperability Task Force
Hide details for International 450 mm Physical Interfaces & CarriersInternational 450 mm Physical Interfaces & Carriers
5974 New Auxiliary Information: 450mm PIC Interoperability
Hide details for North AmericaNorth America
Hide details for Global PIC Maintenance Task ForceGlobal PIC Maintenance Task Force
5817 Revision to SEMI E72-0600 (Reapproved 0305), Specification and Guide for 300 mm Equipment Footprint, Height, and Weight with title change to: Specification and Guide for Equipment Footprint, Height, and Weight
5869 Line Item Revision to SEMI E84-1109, Specification for Enhanced Carrier Handoff Parallel I/O Interface
5951 Reapproval of SEMI E100-1104 (Reapproved 0710) Specification for a Reticle SMIF Pod (RSP) Used to Transport and Store 6 Inch or 230 mm Reticles
5953 Reapproval of SEMI E131-0304 (Reapproved 0310) Specification for the Physical Interface of an Integrated Measurement Module (IMM) into 300 mm Tools Using Bolts-M
5954 Reapproval of SEMI E15.1-0305 (Reapproved 1110) Specification for 300 mm Tool Load Port
Hide details for International Reticle SMIF Pod and Load Port Interoperability Task ForceInternational Reticle SMIF Pod and Load Port Interoperability Task Force
5941 Line Item Revision to Add Related Information to SEMI E111 and References to the New RI in E112, E117, E19
Hide details for NA 450mm Assembly Test Die Prep Task ForceNA 450mm Assembly Test Die Prep Task Force
TFOF NA 450mm Assembly Test Die Prep Task Force
Hide details for NA 450mm Shipping Box Task ForceNA 450mm Shipping Box Task Force
TFOF NA 450mm Shipping Box Task Force
Hide details for Silicon WaferSilicon Wafer
Hide details for InternationalInternational
Hide details for International 450 mm Shipping BoxInternational 450 mm Shipping Box
TFOF International 450 mm Shipping Box
Hide details for International Advanced Wafer Geometry Task ForceInternational Advanced Wafer Geometry Task Force
TFOF International Advanced Wafer Geometry Task Force
Hide details for International Annealed Si Wafer Task ForceInternational Annealed Si Wafer Task Force
TFOF International Annealed Si Wafer Task Force
Hide details for International Automated Advanced Surface Inspection Task ForceInternational Automated Advanced Surface Inspection Task Force
TFOF International Automated Advanced Surface Inspection Task Force
Hide details for International Epitaxial Wafers Task ForceInternational Epitaxial Wafers Task Force
TFOF International Epitaxial Wafers Task Force
Hide details for International Polished Wafers Task ForceInternational Polished Wafers Task Force
TFOF International Polished Wafers Task Force
Hide details for International SOI Wafers Task ForceInternational SOI Wafers Task Force
TFOF International SOI Wafers Task Force
Hide details for International Terminology Task ForceInternational Terminology Task Force
TFOF International Terminology Task Force
Hide details for International Test Methods Task ForceInternational Test Methods Task Force
TFOF International Test Methods Task Force
Hide details for JapanJapan
Hide details for Fiducial Mark Interoperability Task ForceFiducial Mark Interoperability Task Force
TFOF Fiducial Mark Interoperability Task Force
Hide details for International 450 mm Shipping BoxInternational 450 mm Shipping Box
5069 New Standard: Specification for 450 mm Wafer Shipping System
5877 Revision to SEMI M80-0514, Mechanical Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers with title change to:
Specification for Front-Opening Shipping Box Used to Transport and Ship 450 mm Wafers
Hide details for International Advanced Wafer Geometry Task ForceInternational Advanced Wafer Geometry Task Force
5915 Line Item Revision to SEMI M1-0215, Addition to Related Information : Illustration of Flatness and Shape Metrics for Silicon Wafers
Hide details for International SOI Wafers Task ForceInternational SOI Wafers Task Force
5736 Line Item Revision to M41-1213 Specification of Silicon-on-Insulator (SOI) for Power Device/ICs
Hide details for International Test Methods Task ForceInternational Test Methods Task Force
5687 Line Item Revision of SEMI M60-1113, Test Method for Time Dependent Dielectric Breakdown Characteristics of Amorphous SiO2 Films for Silicon Wafer Evaluation
5834 Line Item Revision to SEMI M85-1014: Guide for the Measurement of Trace Metal Contamination on Silicon Wafer Surface by Inductively Coupled Plasma Mass Spectrometry
Hide details for JA Shipping Box Task ForceJA Shipping Box Task Force
4711 Mechanical Specification for 450 mm Shipping Box Used to Transport and Ship 450 mm Wafers
5975 Reapproval of SEMI M45-1110 Specificatin for 300mm wafer shipping System
TFOF JA Shipping Box Task Force
Hide details for Japan AWG Task ForceJapan AWG Task Force
TFOF Japan AWG Task Force
Hide details for Japan Test Method Task ForceJapan Test Method Task Force
5737 Revision of SEMI MF1391-1107, Test Method for Substitutional Atomic Carbon Content of Silicon by Infrared Absorption
5769 New Standard: Test Method for Nitrogen Content in Silicon by Infrared Absorption
5770 New Standard: Guide For Measuring Bulk Micro Defect Density and Denuded Zone Width in Annealed Silicon Wafers
5772 Revision of MF391-0310: Test Methods for Minority Carrier Diffusion Length in Extrinsic Semiconductors by Measurement of Steady-state Surface photovoltage
5774 New Standard: Sample Preparation Method for Minority Carrier Diffusion Length Measurement in Silicon Wafers by Surface Photovoltage Method
TFOF Japan Test Method Task Force
Hide details for Reclaim Wafer Task ForceReclaim Wafer Task Force
TFOF Reclaim Wafer Task Force
Hide details for Test Method Task ForceTest Method Task Force
5981 NEW STANDARD: TEST METHOD FOR RECOMBINATION LIFETIME OF THE EPILAYER OF THE SILICON EPITAXIAL WAFER (p/p+, n/n+) BY THE SHORT WAVELENGTH EXCITAION MICROWAVE PHOTOCONDUCTIVE DECAY METHOD
TFOF Test Method Task Force
NEW STANDARD: Test method for nitrogen content in silicon by charged particle activation analysis
Hide details for North AmericaNorth America
Hide details for International Advanced Wafer Geometry Task ForceInternational Advanced Wafer Geometry Task Force
5704 Reapproval of SEMI M43-1109, Guide for Reporting Wafer Nanotopgraphy
5744 Line Item Revision to SEMI M49-0613 - Guide for Specifying Geometry Measurement Systems for Silicon Wafers for the 130 nm to 16 nm Technology Generations (Re: to clarify and better define exclusion windows)
Hide details for International Automated Advanced Surface Inspection Task ForceInternational Automated Advanced Surface Inspection Task Force
5990 Revision of SEMI MF1811-xx1y GUIDE FOR ESTIMATING THE POWER SPECTRAL DENSITY FUNCTION AND RELATED FINISH PARAMETERS FROM SURFACE PROFILE DATA
5994 Line Item Revision to SEMI M50, Test Methods for Determining Capture Rate and False Count Rate for Surface Scanning Inspection Systems by the Overlay Method (Fix title for conformance)
5995 Line Item Revision of SEMI MF1048-1111 TEST METHOD FOR MEASURING REFLECTIVE TOTAL INTEGRATED SCATTER
Hide details for International Epitaxial Wafers Task ForceInternational Epitaxial Wafers Task Force
5989 Revision of SEMI M62-0515, Specifications for Silicon Epitaxial Wafers
Hide details for International Polished Wafers Task ForceInternational Polished Wafers Task Force
5993 Line Item Revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers
6019 Line item revision of SEMI M1-0416, Specification for Polished Single Crystal Silicon Wafers
Hide details for International Test Methods Task ForceInternational Test Methods Task Force
5703 New Standard: Guide for Carrier Recombination Lifetime Measurements in Electronic Grade Silicon
Hide details for Silicon Wafer CommitteeSilicon Wafer Committee
TFOF Silicon Wafer Committee
Hide details for TraceabilityTraceability
Hide details for JapanJapan
Hide details for 5 Year Review TF5 Year Review TF
5971 Reapproval ballot for: SEMI T19-0311: Specification for Device Marking
TFOF 5 Year Review TF
Hide details for Fiducial Mark Interoperability Task ForceFiducial Mark Interoperability Task Force
5890 Revision to SEMI T7-0415 Specification for back surface marking of double-side polished wafers with a two-dimensional matrix code symbol
TFOF Fiducial Mark Interoperability Task Force
Hide details for Japan PV Traceability Task ForceJapan PV Traceability Task Force
TFOF Japan PV Traceability Task Force
Hide details for North AmericaNorth America
Hide details for 5 Year Review TF5 Year Review TF
5614 Revision of SEMI T3, Specification for Wafer Box Labels (Re:to extend application to other symbologies and Near-Field Communication)
5918 Reapproval of SEMI T12-0710: Specification for Tracing Jigs and Implements
5919 Reapproval of SEMI T13-1104 (Reapproved 0710): Specification for Device Tracking: Concepts, Behavior, and Services
5921 Reapproval of SEMI T19-0311: Specification for Device Marking
TFOF 5 Year Review TF
Hide details for T5 Revision Task ForceT5 Revision Task Force
TFOF T5 Revision Task Force

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